Piezoelectric-Based Square Diaphragm Pressure Sensor Modelling and Analysis using PZT-5H and PZT-5A
نویسندگان
چکیده
This study presents the analytical model and 3D simulation of piezoelectric square diaphragm pressure based on PZT-5H PZT-5A. The sensor's stress electrostatic are explained in sensor, all variables impacting induced output voltage covered. Piezoelectric materials such as PZT-5A, PZT-5J, PVDF, PMN-PT, LiNbO3, AlN, ZnO used to create sensors. COMSOL Multiphysics simulator simulates suggested sensor verify model. validation using simulated values revealed that characteristics linear with applied have a negative slope. also identifies forms when tensile occurs. PZT-5H-based sensitivities -5.879 mV/kPa -6.279 mV/kPa, respectively. for PZT-5A-based -7.468 -7.347
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ژورنال
عنوان ژورنال: SSRG international journal of electrical and electronics engineering
سال: 2023
ISSN: ['2348-8379', '2349-9176']
DOI: https://doi.org/10.14445/23488379/ijeee-v10i8p101